✦ LIBER ✦
7428. A new design for the disk-type molecular pump: J Y Tu et al, J Vac Sci Technol, A8, 1990, 3870–3873
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 110 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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