✦ LIBER ✦
7409. Diffusion barrier properties of Ti/TiN investigated by transmission electron microscopy: M Mändl et al, J Appl Phys, 68, 1990, 2127–2132
- Book ID
- 103471049
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 150 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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