7405. Electron trapping characterization by Auger electron spectroscopy in silicon oxynitride thin film: A J de Castro et al, J Vac Sci Technol, A8, 1990, 2236–2240

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 150 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91212-7