✦ LIBER ✦
7404. An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protected overlayers at microelectronic solid/ liquid interfaces: S Matts Goho, J Vac Sci Technol, A8, 1990, 3026–3032
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 153 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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