7381. On the use of H+ and Ar+ ions for high spatial resolution depth profiling: J Verhoeven et al, Vacuum, 41, 1990, 1327–1329

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 153 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91188-t