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7349. Etching procedures of GaAs: cathodoluminescence study of the induced damages and of the recovering techniques: A C Papadopoulo et al, J Vac Sci Technol, B8, 1990, 407–412


Book ID
103469889
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
150 KB
Volume
42
Category
Article
ISSN
0042-207X

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