✦ LIBER ✦
7344. Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections: C-K Hu et al, J Vac Sci Technol, A8, 1990, 1498–1502
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 150 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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