✦ LIBER ✦
7337. Interfacial reaction of Ta- and Si-rich tantalum silicides with Si substrate: T Hara and M Murota, J Appl Phys, 68, 1990, 183–188
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 142 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.