7334. Thermal conductivity and diffusivity of a thin film SiO2Si3N4 sandwich system: F Völklein, Thin Solid Films, 188, 1990, 27–33

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 142 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91141-a