✦ LIBER ✦
7330. Formation and structure of epitaxial ruthenium silicides on (111) Si: Y S Chang and m L Chou, J Appl Phys, 68, 1990, 2411–2414
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 150 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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