✦ LIBER ✦
7288. Construction and operation of an ultrahigh vacuum chemical vapor deposition epitaxial reactor for growth of GexSi1−x: D W Greve and M Racanelli,J Vac Sci Technol, B8, 1990, 511–515
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 152 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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