✦ LIBER ✦
726. A triode-rf-sputtering system for film deposition in the 10−4 torr range: O Sagev, Vakuum-Technik, 20 (8), Dec 1971, 225–231 (in German)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 168 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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