7229. Properties of aluminium oxide films prepared by plasma-enhanced metal-organic chemical vapour deposition: Chang Jin Kang et al,Thin Solid Films, 189, 1990, 161–173

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 301 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91036-n