7228. Amorphous silicon nitride thin films deposited using dc discharge and post-discharge devices: J L Jauberteau et al,Thin Solid Films, 189, 1990, 111–123

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 153 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91035-m