✦ LIBER ✦
7227. Nitridation of SiO2 thin films at low ammonia pressure: composition and electrical properties: B Balland et al,Thin Solid Films, 190, 1990, 103–128
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 153 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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