✦ LIBER ✦
7212. Formation of silicon-based heterostructures in multichamber integrated-processing thin-film deposition systems: G Lucovsky et al,J Vac Sci Technol, A8, 1990, 1947–1954
- Book ID
- 103468684
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 154 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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