7205. Stress measurements of Pt/Ti/InP and Pt/Ti/SiO2/InP systems: insitu measurements through sintering and after rapid thermal processing: A Katz et al,J Appl Phys, 67, 1990, 6237–6246

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 306 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91012-d