7204. Adhesion enhancement of Ni films on polymide using ion processing. III: Si intermediate layers and 84Kr+ implantation: A A Galuska,J Vac Sci Technol, B8, 1990, 488–494

• Book ID: 103468676
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 155 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91011-c