✦ LIBER ✦
7199. dc reactive magnetron sputering of silicon in hydrogen at low substanstrate temperatures: J N Avaritsiotis and E Roditi,Thin Solid Films, 187, 1990, 77–90
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 307 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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