✦ LIBER ✦
7194. Film thickness distribution control with off-axis circular magnetron sources onto rotating substrate holders: comparison of computer simulation with pratical results: S Swann et al,J Vac Sci Technol, A8, 1990, 1299–1303
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 154 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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