✦ LIBER ✦
7185. Simulation and measurement of density variation in Mo films sputter deposited over oxide steps: RN Tait et al, J Vac Sci Technol, A8, 1990, 1593–1596
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 144 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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