7175. Preparation of AIN films by planar magnetron sputtering system with facing two targets: K Tominaga, Vacuum, 41, 1990, 1154–1156

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 151 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90982-o