✦ LIBER ✦
7171. Characterization of Ta thin films obtained by dc sputtering: AP Mammana et al, Vacuum, 41, 1990, 1403–1404
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 156 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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