✦ LIBER ✦
679. Application of low energy sputtering for thin film deposition: T W Nickerson and R Moseson,Semiconductor Prod Solid State Technol, 7 (12), Dec 1964, 33–36
- Publisher
- Elsevier Science
- Year
- 1965
- Tongue
- English
- Weight
- 146 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0042-207X
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