6.6 MHz silicon AFM cantilever for high-speed readout in AFM-based recording

✍ Scribed by S. Hosaka; K. Etoh; A. Kikukawa; H. Koyanagi; K. Itoh

• Book ID: 104306538
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 619 KB
• Volume: 46
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(99)00027-1