6.3-GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane

✍ Scribed by A. Muller; D. Neculoiu; G. Konstantinidis; A. Stavrinidis; D. Vasilache; A. Cismaru; M. Danila; M. Dragoman; G. Deligeorgis; K. Tsagaraki

• Book ID: 126676802
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 252 KB
• Volume: 30
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2009.2023538