✦ LIBER ✦
6165. Near-surface microstructural modifications in low energy hydrogen ion bombarded silicon: K Yoshihara et al, J Vac Sci Technol, A3, 1985, 1804–1808
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 183 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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