✦ LIBER ✦
6135. Kinetics of Si(100) nitridation first stages by ammonia: electro-beam-induced thin film growth at room temperature: A Glachant and D Saidi, J Vac Sci Technol, B3, 1985, 985–991
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 189 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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