𝔖 Bobbio Scriptorium
✦   LIBER   ✦

6131. New radio frequency technique for deposition of hard carbon films: A R Nyaiesh et al, J Vac Sci Technol, A3, 1985, 610–613


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
189 KB
Volume
36
Category
Article
ISSN
0042-207X

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