✦ LIBER ✦
6128. Formation of ultrathin tungsten filaments via selective low-pressure chemical vapor deposition: H H Busta et al, J appl Phys, 58, 1985, 987–989
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 189 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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