✦ LIBER ✦
6126. Refractory metal silicide formation by sputtering a refractory metal on heated Si substrates: M Tanielian and S Blackstone, J Vac Sci Technol, A3, 1985, 714–717
- Book ID
- 103462870
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 188 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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