✦ LIBER ✦
6119. Sputter depositions of silicon film by a planar magnetron cathode equipped with three targets: T Serikawa and A Okamoto, J Vac Sci Technol, A3, 1985, 1784–1787
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 184 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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