✦ LIBER ✦
6118. Secondary ion and sputtered neutral formation from oxygen loaded Si(100): P Sander et al, J Vac Sci Technol, A3, 1985, 1946–1954
- Book ID
- 103462862
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 184 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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