✦ LIBER ✦
6082. All aluminum alloy, 800-mm-inner diameter gate valve using dual flat-face seals together with differential pumping: H. Ishimaru et al, J Vac Sci Technol, A3, 1985, 1703–1706
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 135 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0042-207X
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