✦ LIBER ✦
6 nm half-pitch lines and 0.04 µm 2 static random access memory patterns by nanoimprint lithography
✍ Scribed by Austin, Michael D; Zhang, Wei; Ge, Haixiong; Wasserman, D; Lyon, S A; Chou, Stephen Y
- Book ID
- 121311248
- Publisher
- Institute of Physics
- Year
- 2005
- Tongue
- English
- Weight
- 671 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0957-4484
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