✦ LIBER ✦
576. Method of testing the thickness of a film during actual deposition: V T Nikolaev, USSR Patent No 255, 728, appl 15 April 1968, publd 10 April 1970
- Publisher
- Elsevier Science
- Year
- 1971
- Tongue
- English
- Weight
- 166 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0042-207X
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