565. Electromagnetic stigmator of an equipment for electron-beam micromachining: I Mokrauz and W Slowko, Pr Nauk Inst Technol Elektron PWr, No 8, 1973, 23–28 (in Polish).

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 172 KB
• Volume: 24
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(74)92079-x