564. Calculation of the surface temperature of a film during deposition: M M Nekrasov and A G Zaporozhets, Problems of Microelectronics, Collect, Kiev Naukovaya Dumka 1971, 172–179 (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 149 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)90415-0