✦ LIBER ✦
5356. Sharp profiles with high aM low doping levels in silicon grown by molecular beam epitaxy: S S Iyer et al, J Appl Phys, 52 (9), 1981, 5608–5613
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 151 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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