✦ LIBER ✦
5348. Laser implantation of impurity atoms into silicon and galliumarsenide single crystals: S Damgaard et al, J Appl Phys, 52 (11), 1981, 6907–6916
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 150 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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