✦ LIBER ✦
5290. Oxidation kinetics of TiN thin films: M Wittmer et al, J Appl Phys, 52 (11), 1981, 6659–6664
- Book ID
- 103465954
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 151 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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