✦ LIBER ✦
5226. Transmission electron microscope study of ion beam annealing effects of ion-implanted and evaporated amorphous silicon: L J Chen et al, J Appl Phys, 52 (5), 1981, 3304–3309
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 143 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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