✦ LIBER ✦
521. Vacuum equipment with selective pumping of harmful gases in the working volume: M M Nekrasov et al, Problems of Microelectronics, Collect, Kiev Naukovaya Dumka 1971, 52–57 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 148 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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