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5184. Growth of dislocation-free silicon films by molecular beam epitaxy (MBE): H Sugiura and M Yamaguchi, J Vac Sci Technol, 19 (2), 1981, 157–160


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
141 KB
Volume
32
Category
Article
ISSN
0042-207X

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