✦ LIBER ✦
5168. Gold gettering in silicon by phosphorous diffusion and argon implantation: Mechanisms and limitations: D Lecrosnier et al, J Appl Phys, 52 (8), 1981, 5090–5097
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 282 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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