✦ LIBER ✦
5167. Effect of silicon dioxide surface-layer thickness on boron profiles for directly aligned implants into (100) silicon: D R Myers et al, J Appl Phys, 52 (5), 1981, 3357–3359
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 144 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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