511. Utilization of low-voltage Penning discharge for preparation of thin dielectric films: V A Vedernikov and T I Danilina, Mikroelektronika, 2 (3), 1973, 248–251 (in Russian).

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 182 KB
• Volume: 24
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(74)92025-9