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5096. Contribution of anisotropic velocity distribution of recoil atoms to sputtering yields and angular distributions of sputtered atoms: Y Yamamura Rad Effects, 55 (12), 1981, 49–56


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
140 KB
Volume
32
Category
Article
ISSN
0042-207X

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