✦ LIBER ✦
5095. The dependence of deposition rate on power input for dc and rf magnetron sputtering: AR Nyaiesh and L Holland Vacuum, 31 (7), 1981, 315–317
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 140 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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