✦ LIBER ✦
5086. Electrical properties of SiO2 and Si3N4 dielectric layers on InP: LG Meiners J Vac Sci Technol, 19 (3), 1981, 373–379
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 140 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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